Vacuum Probe Station (VPS series)


* Probing under high vacuum up to 10-7 mbar
* Different substrate carriers for wafers up to 8” or single dies
* High flexibility, system is customized to user's requirements
* wide range of measurements (I-V, C-V, HF)
* Other test equipment can be implemented (e.g. motion analysis)
* The main application is MEMS/MOEMS
More Details


1. Anti-vibration Table

2. Adapter – Connect with different instruments

3. Vacuum pump (Turbo, Mechanical)

4. Vacuum gauge

5. Valves

6. Air compressor

7. Others

All Posts