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RF Hot Chuck (TC2-RF series)
Features:
* High Isolation
* Fast cycling time
* Excellent Temperature Uniformity
* Low Noise
* Low Capacitance
* High Temperature Resolution
* Auxiliary chuck
* High Isolation
* Fast cycling time
* Excellent Temperature Uniformity
* Low Noise
* Low Capacitance
* High Temperature Resolution
* Auxiliary chuck
More Details
Specs:
| * chcuk size: 4-12 inch |
| * Temperature range: RT to 300 ˚C |
| * Copper plate coated with Nickel |
| * 48mmx48mm OMRON controller |
| * Accuracy ±0.5℃ at 100℃ |
| * Resolution 0.01℃ |
| * Vacuum zone: vacuum hole * Signal connector: grounding screw |
| * RS232 or RS485 communication port |
| * Temperature control software |