RF Hot Chuck (TC2-RF series)

Features:
* High Isolation
* Fast cycling time
* Excellent Temperature Uniformity
* Low Noise
* Low Capacitance
* High Temperature Resolution
* Auxiliary chuck
More Details

Specs:

* chcuk size: 4-12 inch
* Temperature range: RT to 300 ˚C
* Copper plate coated with Nickel
* 48mmx48mm OMRON controller
* Accuracy ±0.5 at 100
* Resolution 0.01 
* Vacuum zone: vacuum hole
* Signal connector: grounding screw
* RS232 or RS485 communication port
* Temperature control software
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