Manual Mask Aligner (MA series)

Features:
‧High Quality Exposure Optics
‧High Resolution Capability
‧High Precision Alignment Stage
‧Wedge Error Compensation
‧Reasonable Price
‧PLC Control
‧Precise Gap Setting
‧Reliable and Stable
More Details

Specs:

 
Light Source
* UV lamp light source
* 350 Watt constant power power supply
* Wavelength : 350-450nm
* Intensity : 15-20 mW/cm2 
* Uniform Beam Size:  100mmx100mm 
* Beam Uniformity: ±5% 
* Beam Angle < 2.5 deg
 
Top Side Microscope System
* Single CCD Camera Alignment System (Dual CCD option)
* Continuous Video Zoom Magnification from 50x to 300x
* LCD color Monitors.
* LED coaxial illumination
* X,Y,Z travel range: 20mm
* X,Y quick movement: 100mm
 
Alignment Stage
* Wedge Error Compensation (WEC) 
* Including X, Y, θ and Z adjustment
* X, Y, θ micrometer, with totally 10mm travel range, θ rotation range 3 deg
* Accuracy: 2um 
* With Proximity and Vacuum Contact mode 
* Wedge Error Compensation (WEC) 
 
Operating Interface
* Manual switch/button control .
* Exposure timer setting up to 999.9 sec.
* Switch for easy mask change.
* Emergency stop button.
 
Accessory
* Mask Holder
* Vacuum Chuck:
* Vacuum chuck for broken piece (option)
* Quite air compressor (option)
* Vacuum pump (option)
 
Anti-vibration table (option)
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