Gantry Probe Station (GPS series)


* High reliability
* High stability
* Platen adjustable
* Larger microscope travel range
* Sample size could be 6-12 inch
* The major application is semiconductor, microelectronics, electrics, physics, materials, chemistry,
opto-electrics, MEMS, bio-technology, aerospace … etc.
* It also could be applied for IC design/manufacture/package/testing, LED, LCD/OLED, LD/PD, PCB, FPC industries.
More Details


1. Shielding Box – Light and EMI shielded

2. Anti-vibration Table

3. Thermal Chuck

4. Probe Card Holder– high measurement efficiency

5. Adapter – Connect with different instruments

6. Vacuum pump

7. Air compressor

8. Others

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