EZ Mask Aligner (EZA series)

Features:
• Suitable for academic customer
• Suitable for budget limited customer
• Desktop, no anti-vibration table
• Wafer size : 4"
• Lamp power : 250W
• Spectrum : NUV (300nm~400nm)
• High quality exposure optics
• Wedge Error Compensation (WEC)
• Alignment accuracy: 2um
• Chuck, mask holder adjustment : 10mm
• Precise gap setting