Double Sided Mask Aligner (DA Series)

Features:
‧High Quality Exposure Optics
‧High Resolution Capability
‧High Precision Alignment Stage
‧Double side Alignment Stage
‧Wedge Error Compensation
‧Reasonable Price
‧PLC Control
‧Precise Gap Setting
‧Reliable and Stable
More Details

Specs:

Light Source
 
* 350 Watt Power Supply
* Constant Intensity Power Supply
* Wavelength : 350nm-450nm 
* 365 nm Beam Intensity : 15-25 mW/cm2 
* Uniform Beam Size:  4.0" Diameter 
* Beam Uniformity: ±3% over 4" Diameter
* Beam Angle < 2.0 deg
* 365nm/405nm sensors feedback control
 
Top Side Microscope System
* Dual lens Alignment System 
* Image Magnification : 50x-300x
* Two sets of 19" color Monitors.
* LED coaxial illumination
* Lens movement range XYZ : 20mm 
* Lens separation range 1.8" to 4"
* Best alignment accuracy: 1.0um
 
Bottom Side Microscope System
* Dual lens Alignment System 
* Image Magnification : 50x-300x
* LED coaxial illumination
* Lens movement range XYZ : 10mm 
* Image capture System
* Best alignment accuracy: 2.0um
 
Alignment Stage
* Including X, Y, θ and Z adjustment
* X, Y, Z  travel range : 10mm
* θ rotation range : 3 deg
* Proximity gap range : 0-3mm
* Accuracy: 1um 
* With Proximity and Contact exposure mode 
* Wedge Error Compensation (WEC) 
 
Operating Interface
* PLC control .
* Exposure timer setting up to 999.9 sec.
* Switch for easy mask change.
* Emergency stop button.
 
 Anti-vibration table
* Pneumatic Isolation
* Come with retractable casters
* Normal working pressure 4 kg
* Required air pressure 3~5 kg
* Natural frequency 2-3Hz
* Dimension W900xD700xH750mm
 
Accessory
* Mask Holder
* Bottom side Chuck
 
UV Lamp
*350/500W Hg Arc lamp
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