FPD Series ( FPD 1620 )

• Dimenson ( W / D / H ) : 1550mm X 1200mm X 2000mm
• Weight : 1500kg
• Chuck theta : +/- 10 degree
• Microscope coarse adjustment 400mm X 500mm
• Microscope fine adjustment 25mm X 25mm
• Microscope Z pneumatic up 60mm
• Chuck size 400mm X 500mm
• Chuck go out 250mm for easy substrate loading
• Platen travel range 600mm X 700mm
• Vibration damper X 4
• Other size on request

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Manual Analytical Probe Station ( APS150 / APS200 )

• Dimension ( W / D / H )
• APS150 : 580mm X 460mm X 700mm
• APS200 : 660mm X 660mm X 700mm
• Weight ( APS150 / APS200 ) : 60kg / 80kg
• Vacuum chuck : Stainless steel ( Thermal chuck option )
• Chuck stage travel :
• Quick move ( APS150 / APS200 ) : 150 X 150mm / 200 X 200mm
• Fine adjust ( APS150 / APS200 ) :150 X 150mm / 200 X 200mm
• Chuck theta : 0 ~ 30 degree ( Fine adjust theta option )
• Chuck up / down : 5mn
• Microscope stage travel : 25mm X 25mm
• Microscope Z up for objective changer over option
• Platen movement : fixed ( moveable option )

4" Manual Analytical Probe Station ( APS 4 )

• Vacuum chuck : 4" Stainless steel
• Chuck stage travel : 100mm X 100mm
• Chuck theta : 0 ~ 30 degree
• Chuck up / down : 5mm
• Microscope stage travel : 25mm X 25mm

4" Easy Probe Station ( EPS 4 )

• Dimension ( W / D / H ) : 350mm X 350mm X 400mm
• Weight : 20kg
• Vacuum chuck : 4" Stainless steel ( Gold plating on request )
• Chuck stage travel : 75mm X 75mm
• Chuck theta : +/- 30 degree

Mini Chabmer Probe Station ( AMC 150 )

• Dimension ( W / D / H ) : 600mm X 500mm X 600mm
• Weight : 80kg
• Chuck : 6" hot chuck
• Temperature : -30 degreeC ~ 200 degreeC
• Platen : 500mm moveable
• Microscope stage travel : 25mm X 25mm
• Chuck stage travel : 150mm X 150mm

Four Point Probe ( FPP Series )

• Dimension ( W / D / H ) : 220mm X 420mm X 250mm
• Weight : 20kg
• Chuck : 4", 6", 8" dia. POM
• Head up / down coarse : 60mm
• Head up / down fine : 10mm
• Probing Z resolution : 1 Micron
• Probe pin spacing : 62.5mil

Temperature Four Point ( TFP Series )

• Dimension ( W / D / H ) : 30mm X 50mm X 20mm
• Weight : 25kg
• Chuck : Thermal chuck 4", 6", 8"
• Chamber : Enclosed stainless steel
• Nitrogen purge prevent oxidation

Micropositioner

• Magnet and Vacuum base available
• Travel range 12mm
• Resolution down to 1um
• Various model available
• Model : MH100, MH200, MH300, MH500