• Excellent Quality
• Reasonable Price
• Prompt Response
• Satisfied Service
• Custom Design
• Worldwide Support
• Innovative Technology
• Creative Thinking

FPD Series ( FPD 1620 )

• Dimenson ( W / D / H ) : 1550mm X 1200mm X 2000mm
• Weight : 1500kg
• Chuck theta : +/- 10 degree
• Microscope coarse adjustment 400mm X 500mm
• Microscope fine adjustment 25mm X 25mm
• Microscope Z pneumatic up 60mm
• Chuck size 400mm X 500mm
• Chuck go out 250mm for easy substrate loading
• Platen travel range 600mm X 700mm
• Vibration damper X 4
• Other size on request

Manual Analytical Probe Station ( APS150 / APS200 )

• Dimension ( W / D / H )
• APS150 : 580mm X 460mm X 700mm
• APS200 : 660mm X 660mm X 700mm
• Weight ( APS150 / APS200 ) : 60kg / 80kg
• Vacuum chuck : 150mm/200mm Stainless steel (Thermal chuck option)
• Chuck theta : 0 ~ 30 degree (Fine adjust theta option)
• Chuck up / down : 5mn
• Microscope stage travel : 25mm X 25mm
• Pneumatic microscope Z up for objective changer over (option)
• Platen movement : fixed ( moveable option )
• Ball Screw Driven Chuck Stage
• RF Probing Field Upgradeable
• High Magnification Microscope Compatible

Standard Probe Station
( SPS 4/6 )

• Dimension ( W / D / H )
• SPS4 : 580mm X 460mm X 245mm
• SPS6 : 580mm X 460mm X 400mm
• Weight ( SPS4 / SPS6 ) : 41kg / 45kg
• Vacuum chuck : 4"/6" Stainless steel (Thermal chuck option)
• Chuck theta : 0 ~ 30 degree (Fine adjust theta option)
• Chuck up / down : 5mn
• Microscope stage travel : 15mm X 15mm
• Microscope Z up for objective changer over (option)
• Platen movement : fixed ( moveable option )
• Fine movement Knob adjustment for Chuck X-Y
• RF Probing Field Upgradeable

Easy Probe Station ( EPS 4 )

• Dimension ( W / D / H ) : 350mm X 350mm X 400mm
• Weight : 20kg
• Vacuum chuck : 4" Stainless steel ( Thermal chuck option )
• Chuck stage travel : 75mm X 75mm
• Chuck theta : 0 ~ 30 degree
• Easy Operation and Maintenance

Mini Chabmer Probe Station ( AMC 150 )

• Dimension ( W / D / H ) : 600mm X 500mm X 600mm
• Weight : 80kg
• Chuck : 6" hot chuck
• Temperature : -30 degreeC ~ 200 degreeC
• Platen : 500mm moveable
• Microscope stage travel : 25mm X 25mm
• Chuck stage travel : 150mm X 150mm

Micropositioner

• Magnet and Vacuum base available
• Travel range 12mm
• Resolution down to 1um
• Various model available
• Model : MH100, MH300, MH500